The Origin and Structure of Vacuum Reflux Furnace

Vacuum reflux furnace, also known as vacuum welding furnace, vacuum eutectic furnace, and vacuum sintering furnace. High quality welding of the product is carried out in a vacuum environment. During the heating or cooling process, inert shielding gas and reducing systems (N2, formic acid, N2H2, H2) are introduced to protect the product and solder from oxidation, remove organic matter from the welding surface, and form a clean welding surface. At the same time, the oxide reaction between the product and solder surface improves the quality of the welding surface and reduces the porosity of the welding.

Chinese name: Vacuum reflux furnace

Foreign name: vacuum solver system

Alternative names: vacuum welding furnace, vacuum eutectic furnace, vacuum sintering furnace (mainly distinguished by welding material and welding temperature)

Basic structure

The vacuum reflux furnace includes the following structures: gas path system, cooling system, heating system, vacuum system, measurement system, and safety system:

Air circuit system

Nitrogen filling system, H2+N2 mixed gas filling system, formic acid filling system, hydrogen filling system, etc

Cooling system

Divided into internal circulation and external circulation

Internal circulation: There is a water tank and coolant inside the equipment (which can be antifreeze, pure water, deionized water, etc.), and the water inside the water tank is circulated through a water pump to cool the heating plate and flange.

External circulation: The customer provides external cooling water to cool the water tank.

heating system 

Including main heating and edge heating.

The main heating is also the entire heating plate. 95% of the heating.

Edge heating refers to adding edge heating pipes around the hot plate to better improve the uniformity of the hot plate and increase the effective area of the process.

vacuum system

Vacuum pump vacuum pumping process: gas inside the chamber - main valve - vacuum pump - pipeline, etc